Apparatus and method for electron beam irradiation having...

Details Apparatus and method for electron beam irradiation having... Apparatus and method for electron beam irradiation having...

2006-06-27

2006-06-27

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S394000, C250S453110, C250S337000, C250S305000, C250S434000, C250S400000, C053S167000, C053S426000, C141S085000

Reexamination Certificate

active

07067827

ABSTRACT:
The present invention is related to an apparatus and method for irradiating a product package, comprising a radiation source directing a radiation beam along a beam direction towards said product package, conveying means for transporting said product package past said radiation source along a transport path, and reflecting means located on at least one side of the plane formed by said beam direction and said transport path. By adjusting the distance and angle of the reflecting means to the conveyor and beam, and improved dose uniformity ratio is obtained.

REFERENCES:
patent: 4010374 (1977-03-01), Ramler
patent: 4324813 (1982-04-01), Sonnenberg
patent: 4983849 (1991-01-01), Thompson et al.
patent: 5809739 (1998-09-01), Eno
patent: 5825037 (1998-10-01), Nablo
patent: 6833551 (2004-12-01), Avnery
patent: 08322914 (1996-12-01), None
patent: 98/24484 (1998-06-01), None

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