Apparatus and method for charged-particle beam writing

Details Apparatus and method for charged-particle beam writing Apparatus and method for charged-particle beam writing

2010-02-12

2011-10-04

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492200, C250S492300, C250S398000, C430S296000

Reexamination Certificate

active

08030626

ABSTRACT:
An average write speed M is calculated by averaging write speeds for blocks of a tentative block size La, and write speed variation σ of the blocks with respect to the average write speed M is calculated (Step S12). A maximum speed Vmax is calculated by accelerating and then decelerating (or decelerating and then accelerating) a stage when moving the stage by the width of one of the blocks of the tentative block size La (Step S13). When the relationship “Vmax−M≧σ” does not hold, the tentative block size La is increased (Step S15). When the relationship “Vmax−M≧σ” holds, the tentative block size La is set as an optimal block size Lb (Step S16).

REFERENCES:
patent: 6566662 (2003-05-01), Murakami et al.
patent: 7863586 (2011-01-01), Abe
patent: 2008/0265174 (2008-10-01), Hiramoto et al.
patent: 2008/0299490 (2008-12-01), Takekoshi
patent: 2009/0032738 (2009-02-01), Takekoshi
patent: 2010/0032588 (2010-02-01), Takekoshi
patent: 2008-182073 (2008-08-01), None

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