Method for compressing pattern data and data compression process

Method for controlled implantation of elements into the surface

Method for controlling a vaporizer of ion implantation...

Method for controlling charge amount of ion beam and a wafer...

Method for controlling the migration of a chemical species withi

Method for correcting a proximity effect, an exposure...

Method for correcting electron beam exposure data

Method for correcting proximity effects in electron beam lithogr

Method for defect and conductivity engineering of a...

Method for depositing a film using a charged particle beam,...

Method for depositing a film using a charged particle beam,...

Method for depositing a film using a charged particle beam,...

Method for determining ultra shallow junction dosimetry

Method for device editing

Method for drawing a pattern by charged beam and its apparatus

Method for eliminating low frequency error sources to...

Method for exposing a pattern on an object by a charged particle

Method for fabricating a metal-insulator-metal capacitor

Method for fabricating semiconductor device

Method for implanter angle verification and calibration