Method for controlling the migration of a chemical species withi

Details Method for controlling the migration of a chemical species withi Method for controlling the migration of a chemical species withi

1978-04-11

1980-03-11

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

148186, H01J 3706

Patent

active

041930037

ABSTRACT:
The method for controlling the migration of an electronegative chemical species within a solid substrate which exhibits ionic conduction consists in irradiating the substrate with electrons which have sufficient energy to penetrate into the substrate and to produce therein metastable excited negative ions of said species and in applying to said substrate an electric field having a direction opposite to the desired direction of migration.

REFERENCES:
patent: 3498852 (1970-03-01), Jamini
patent: 3539401 (1970-11-01), Yamashita
patent: 3725148 (1973-04-01), Kendall

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