Electromagnetic regulator assembly for adjusting and...

Details Electromagnetic regulator assembly for adjusting and... Electromagnetic regulator assembly for adjusting and...

2006-07-18

2006-07-18

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492200, C250S492300, C250S281000, C250S282000, C250S298000, C250S3960ML

Reexamination Certificate

active

07078713

ABSTRACT:
An electromagnetic regulator assembly for the production of contiguous magnetic fields which are applied to a continuous ion beam is described. The assembly is structured for controlling the uniformity of traveling continuous ribbon-shaped beams; and allows for direct adjustment of the magnetic field gradient of the magnetic field as the parameter for increasing the current uniformity.

REFERENCES:
patent: 5483077 (1996-01-01), Glavish
patent: 6703628 (2004-03-01), Ye et al.
patent: 6835930 (2004-12-01), Benveniste et al.
patent: 2003/0205683 (2003-11-01), Benveniste

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