Apparatus and method for producing ions

Apparatus and method for producing ions

Apparatus for generating negatively charged species

Arc chamber filament for ion implanter

Arc chamber for ion implanter

Arc initiation in cathodic arc plasma sources

Device for generating an atomic cloud

Device for the ionization of metals having a high melting point,

Electron energy recovery system for negative ion sources

EUV light source, EUV exposure equipment, and semiconductor...

Filtered ion source

Fitting for an ion source assembly

Fluid-cooled ion source

Helium ion generation method and apparatus

Implantation quality improvement by xenon/hydrogen dilution gas

Ion generation chamber

Ion source and metals used in making components thereof and...

Ion source head

Ion sources for ion implantation apparatus

Ion-beam source with virtual anode