Apparatus for generating negatively charged species

Details Apparatus for generating negatively charged species Apparatus for generating negatively charged species

1988-12-05

1990-05-08

Anderson, Bruce C.

Radiant energy

Ion generation

Arc type

250423R, 31323141, H01J 304

Patent

active

049241028

ABSTRACT:
An apparatus for generating negatively charged species has a cathode and an anode which are disposed in a vacuum vessel facing each other. A constricted arc having a sufficiently large arc current is generated in an arc space between the anode and the cathode, thereby generating negatively charged species of various types of metals, semiconductors, and gases.

REFERENCES:
patent: 3323002 (1967-05-01), Lafferty
patent: 3356897 (1967-12-01), Barr
patent: 3465192 (1969-09-01), Lafferty
patent: 4458180 (1984-07-01), Sohval
patent: 4490651 (1984-12-01), Taylor et al.
patent: 4587430 (1986-05-01), Adler
patent: 4721889 (1988-01-01), Seidel et al.
Van Os et al., "The Role of Cesium-ion Bombardment in the Formation of Negative Hydrogen Ions on a Converter Surface", J. Appl. Phys. 61 (11), 6/1/87.

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