Ion source and metals used in making components thereof and...

Details Ion source and metals used in making components thereof and... Ion source and metals used in making components thereof and...

2006-09-19

2009-10-06

Vanore, David A (Department: 2881)

Radiant energy

Ion generation

Arc type

C250S42300F, C250S424000, C315S111210, C315S111310, C315S111410, C315S111810, C315S111910, C313S153000, C313S162000, C313S306000, C313S307000, C313S311000

Reexamination Certificate

active

07598500

ABSTRACT:
An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for reducing the costs associated with producing ion sources and/or elements thereof are provided. Such techniques may include, for example, forming the inner and/or outer cathode(s) from 1018 mild steel and/or segmented pieces. Such techniques also or instead include, for example, forming the ion source body from a single steel U-channel, or from segmented pieces making up the same. These techniques may be used alone or in various combinations.

REFERENCES:
patent: 4943485 (1990-07-01), Allam et al.
patent: 6002208 (1999-12-01), Maishev et al.
patent: 6242749 (2001-06-01), Maishev et al.
patent: 6259102 (2001-07-01), Shun'ko
patent: 6359388 (2002-03-01), Petrmichl
patent: 6676134 (2004-01-01), Wiegert et al.
patent: 6815690 (2004-11-01), Veerasamy et al.
patent: 6987364 (2006-01-01), Petrmichl
patent: 6988463 (2006-01-01), Veerasamy et al.
patent: 7030390 (2006-04-01), Veerasamy et al.
patent: 7405411 (2008-07-01), Walton, Hugh A.
patent: 2004/0075060 (2004-04-01), Luten et al.
patent: 2005/0057167 (2005-03-01), Siegfried et al.
Definition of Annealing [online]. Dictionary.com 2008 [retrieved on May 1, 2008].

Affiliated with

Also associated with

Rating

Ion source and metals used in making components thereof and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ion source and metals used in making components thereof and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion source and metals used in making components thereof and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4095431