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Apparatus and method for producing ions

Radiant energy – Ion generation – Arc type
Patent

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Apparatus and method for producing ions

Radiant energy – Ion generation – Arc type
Patent

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Apparatus for generating negatively charged species

Radiant energy – Ion generation – Arc type
Patent

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Arc chamber filament for ion implanter

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Arc chamber for ion implanter

Radiant energy – Ion generation – Arc type
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Arc initiation in cathodic arc plasma sources

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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