Radiant energy – Ion generation – Arc type
Reexamination Certificate
2005-01-25
2005-01-25
Berman, Jack I. (Department: 2881)
Radiant energy
Ion generation
Arc type
C250S427000, C250S42300F, C250S492210, C315S111810, C313S270000, C313S046000, C313S047000
Reexamination Certificate
active
06847043
ABSTRACT:
The invention relates to improving the efficiency of ion flow from an ion source, by reducing heat loss from the source both in the ion chamber of the ion source and its constituent parts (e.g. the electron source). This is achieved by lining the interior of the ion chamber and/or the exterior with heat reflective and/or heat insulating material and by formation of an indirectly heated cathode tube such that heat transfer along the tube and away from the ion chamber is restricted by the formation of slits in the tube. Efficiency of the ion source is further enhanced by impregnating and/or coating the front plate of the ion chamber with a material which comprises an element or compound thereof, the ions of which element are the same specie as those to be implanted into the substrate from the source thereof.
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Armour David George
Burgess Christopher J. S.
Collart Erik J. H.
Goldberg Richard David
Murrell Adrian John
Applied Materials Inc.
Berman Jack I.
Boult Wade Tennah
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