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Implantation quality improvement by xenon/hydrogen dilution gas

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Ion generation chamber

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Ion source and metals used in making components thereof and...

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Ion source head

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Ion sources for ion implantation apparatus

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Ion-beam source with virtual anode

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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