Radiant energy – Ion generation – Arc type
Reexamination Certificate
2007-05-29
2007-05-29
Patidar, Jay M. (Department: 2862)
Radiant energy
Ion generation
Arc type
C250S42300F, C250S424000, C315S111810
Reexamination Certificate
active
10115466
ABSTRACT:
The invention provides methods and apparatus for generating helium ions. The methods involve providing a mixture of helium gas with a second gas in an ion source. The second gas has a lower ionization potential and larger molecules than that of helium. The helium gas is ionized by generating an arc discharge within the ion source. The presence of the second gas enhances the ionization of the helium gas. The increased helium ionization enables formation of helium ion beams having a high beam currents suitable for implantation.
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Kretly, L.C., et al., “Efficient Medium Current He+Extraction Sustained by Auxiliary Plasma Formation in the Ion Source by Solid Material.” Ion Implantation Technology. Proceedings of the 11thInternational Conference, Austin, TX, USA 16-21, Jun. 1996, New York, NY, IEEE, US, Jun. 16, 1996 , pp. 422-423, XP010220700. ISBN: 0-7803-3289-X.
Prillaman Charles
Reyes Jaime M.
Patidar Jay M.
Varian Semiconductor Equipment Associates Inc.
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