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Detector on wheel system (flying spot)

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Detector optics for charged particle beam inspection system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detector optics for electron beam inspection system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detector optics for multiple electron beam test system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detector system for a particle beam apparatus, and particle...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detector system for a scanning electron microscope and a...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Determination of interfacial states in solid heterostructures us

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent

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Determining defect depth and contour information in wafer...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Determining the composition of a solid body

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Device and method for the examination of samples in a non...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Device and method for the examination of samples in a non...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Device and method for the examination of samples in a...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Device and method preventing ion source gases from entering...

Radiant energy – Inspection of solids or liquids by charged particles
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Device and method preventing ion source gases from entering...

Radiant energy – Inspection of solids or liquids by charged particles
Reissue Patent

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Device containing sample preparation sites for transmission elec

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Device for adjusting the position and the orientation around an

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Device for axially and angularly positioning a beam or the like

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Device for computed tomography

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Device for computed tomography

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Device for computer tomography

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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