Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1989-02-27
1990-01-02
Howell, Janice A.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
2504423, 2504551, H01J 3720
Patent
active
048915165
ABSTRACT:
A device for focusing and positioning a high-energy beam in a vacuum chamber comprises a high-energy beam generator (10), which is sealingly connected to a housing (18) of a high-energy beam generator (20), a focusing unit (12) which consists of two tubular elements (26 and 28) having opposite external threads engageable with inner threads on a sleeve (30), and an adjustable connector unit (14) which is connected at one end to the focusing unit and at the other end to a vacuum chamber (16). Connector unit 14 consists of two skewed rings (60 and 62). One of these rings rotates on the lower end of focusing unit (12), while the other end ring is rotatably installed on the end of vacuum chamber (16). Both rings are rotatably connected to each other by means of a set of balls (68) inserted into a race, which is formed by annular grooves on the mating surfaces of the rings. The ball race between the rings is inclined with respect to the guide element which guides ring (60) during its rotation on the focusing unit. As a result, a relative rotation of rings (60 and 62) determines an angular position of the beam (B) emitted by the beam generator with respect to the plane of an object (96) to be treated. The rings can be driven from pulse motors (118 and 120), so that the beam, e.g., an electron beam, can describe any intricate pattern o the obect, e.g., a silicon substrate. Another embodiment of the invention is a device which is based on the same principle, but which can orient a rod (134) which carries a sample (136) to be treated in a vacuum chamber (16).
REFERENCES:
patent: 4460827 (1984-07-01), Onoguchi et al.
Howell Janice A.
Huntington Mechanical Laboratories, Inc.
Nguyen Kiet T.
Pressman David
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