Determining the composition of a solid body

Details Determining the composition of a solid body Determining the composition of a solid body

1987-10-26

1989-05-23

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250310, 250307, H01J 3726

Patent

active

048333239

ABSTRACT:
A method of determining the composition of a solid body comprises guiding a primary ionic beam to impact on the body in a spiral path whereby secondary particles are released from the body which are detected and registered in dependence on the location of their release.

REFERENCES:
patent: 3881108 (1975-04-01), Kondo et al.
patent: 3916190 (1975-10-01), Valentine et al.
patent: 4107527 (1978-08-01), Cherepin et al.
patent: 4661702 (1987-04-01), Welkie
patent: 4683378 (1987-07-01), Shimase et al.
"Scanning Electron Beam Lithography for Fabrication of Magnetic Bubble Circuits", Chang et al., I.B.M. J. Res. Developement, pp. 376-388, Jul. 1976.
"Automatic Electron Beam Fabrication of Micron-Size Devices," Wilson et al., Conference Scanning Electron Microscopy, 1976, pp. 659-668.

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