Detector optics for charged particle beam inspection system

Details Detector optics for charged particle beam inspection system Detector optics for charged particle beam inspection system

2006-10-17

2006-10-17

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S397000

Reexamination Certificate

active

07122795

ABSTRACT:
A charged particle beam column for substrate inspection includes detector optics with high secondary electron detection efficiency combined with minimal distortion of the charged particle beam. One embodiment of the detector optics includes a symmetrizing electrode configured with a secondary electron detector to produce a generally cylindrically symmetric electric field about the optical axis of the column. Control electrodes may be used for screening the charged particle beam from the secondary electron detector and for controlling the electric field at the surface of the substrate. In some embodiments, the control electrodes are cylindrically symmetric about the optical axis; whereas in other embodiments, the cylindrical symmetry of one or more control electrodes is broken in order to improve the secondary electron detection efficiency.

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