Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-10-23
2007-10-23
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S397000, C250S311000, C250S3960ML, C250S3960ML, C250S492200, C250S505100
Reexamination Certificate
active
11327315
ABSTRACT:
With a detector system for the specimen chamber of a scanning electron microscope, signals are simultaneously detected in transmission which signals correspond to a light field contrast and a dark field contrast. The detector system (14) includes four detectors (15to18) in a plane (25) between which an aperture (19) for free access of electrons is located. Behind the aperture (19), a further detector (27) is arranged in a second plane (26). The detectors are preferably diodes. The detectors (15, 16, 17, 18) in the first plane (25), which is closer to the specimen, serve to generate signals which correspond to a dark field contrast. The further detector (27), more distant from the specimen, detects signals corresponding to a light field contrast. Large dead spaces, which are not sensitive to electrons, between the diodes and around the aperture (19), can be avoided by the offset arrangement of four diodes (15, 16, 17, 18) in the first plane (25).
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Bihr Johannes
Jaksch Heiner
Berman Jack I.
Carl Zeiss NTS GmbH
Hashmi Zia R.
Ottesen Walter
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