Device for adjusting the position and the orientation around an

Details Device for adjusting the position and the orientation around an Device for adjusting the position and the orientation around an

1981-08-26

1983-09-20

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

H01J 3720

Patent

active

044058659

ABSTRACT:
The device includes a support tube passing through the wall of the column of the microscope, whose inner end is supported on an inner structure of the microscope by a hemispherical surface. This is supported in the wall around the orientation axis and is connected to the sample-holder which it traverses by control means enabling the position of the sample-holder to be adjusted in the support tube along three axes of a reference dihedral. The control means comprise an annular diaphragm for suspending the sample-holder in the support tube close to the center of the support surface. Lever and push-rod connecting linkages of high stiffness enable the sample-holder to be tilted around the center of the diagram in two perpendicular planes.

REFERENCES:
patent: 2910590 (1954-10-01), van Dorsten et al.
patent: 4101778 (1978-06-01), von Rauch et al.
"Goniometer Stage for Electron Microscopes", Philips.

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