Vibration cancellation system for scanning electron microscopes

Details Vibration cancellation system for scanning electron microscopes Vibration cancellation system for scanning electron microscopes

1988-11-14

1990-08-14

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250306, 250307, H01J 3728

Patent

active

049489712

ABSTRACT:
A method and system to reduce the sensitivity of instruments such as scanning electron microscopes to vibrations and similar disturbances. In the preferred embodiment, the system includes at least two velocity sensors connected to the specimen stage of the microscope to detect vibrations in two independent directions, integrators to integrate output signals from the velocity sensors to indicate displacement of the specimen stage in the two directions, and a beam steering device that receives signals from the integrators and adjusts the normal scanning pattern of the electron beam of the microscope to reduce the effect of vibrations.

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patent: 4618766 (1986-10-01), van der Mast et al.
R. R. Trotter; IBM Technical Disclosure Bulletin, Jun. 1979.

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