Vibration cancellation system for a charged particle beam appara

Details Vibration cancellation system for a charged particle beam appara Vibration cancellation system for a charged particle beam appara

1998-01-23

2000-03-28

Westin, Edward P.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250311, 25044011, G06K 940, H01J 3728

Patent

active

060434902

ABSTRACT:
Mechanical vibration detecting sensors and a sound wave sensor are provided in a column, and mechanical vibration detecting sensors, a sound wave sensor and electromagnetic wave detecting antennas are provided in a sample stage side. Outputs of the sensors and the antennas are processed by signal processing circuits and correction signals generated by these signal processing circuits are added to X-direction and Y-direction scanning signals from signal generating circuits.

REFERENCES:
patent: 4907287 (1990-03-01), Homma et al.
patent: 4948971 (1990-08-01), Vogen et al.
patent: 5874735 (1999-02-01), Matsumoto et al.
Patent Abstracts of Japan, vol. 9, No. 123 (E-317) & JP 60-10723 A (Fujitsu) Jan. 19, 1985.
Patent Abstracts of Japan, vol. 14, No. 65 (E-884) & JP 1-286244 A (Hitachi) Nov. 17, 1989.
Patent Abstracts of Japan, vol. 10, No. 170 (E-412) & JP 610023317 A (Nippon enshi K.K.).
Patent Abstracts of Japan, vol. 6, No. 6, (E-89) & JP 560126927 A (Fujitisu).

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