Voltage contrast detector for a scanning electron beam instrumen

Details Voltage contrast detector for a scanning electron beam instrumen Voltage contrast detector for a scanning electron beam instrumen

1975-03-06

1976-06-01

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, G01M 2303

Patent

active

039611906

ABSTRACT:
A directionally sensitive, high contrast secondary electron detector having a novel geometrical configuration for use in scanning electron microscopes and other electron beam instruments. The aperture of the detector which is placed near the specimen is in non-parallel arrangement with the aperture which admits the primary beam. The geometry of the detector provides for tilting of the specimen with respect to the incident primary electron beam to improve sensitivity and signal-to-noise ratio in comparison with prior detectors. In the preferred embodiment, the shape of the upper grid of the detector is substantially that of a conic section, thereby preventing space-charge build-up during operation.

REFERENCES:
patent: 3445708 (1969-05-01), Webster
patent: 3474245 (1969-10-01), Kimura et al.
patent: 3641341 (1972-02-01), Jamba et al.
patent: 3694652 (1972-09-01), Banbury et al.
patent: 3896308 (1975-07-01), Venables et al.

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