Anode-cathode structure for ion pump having specifically determi
Cathode structure for sputter ion pump
Closed-drift hall effect plasma vacuum pump for process...
Exhaust apparatus and vacuum pumping unit including the exhaust
High vacuum pump
High voltage feedthrough for ion pump
Ion drag vacuum pump
Ion pump
Ion pump
Ion pump
Ion pump for producing an ultrahigh degree of vacuum
Ion pump having secondary magnetic field
Method and apparatus for increasing channel plasma density in an
Novel getter and process
Particle beam instrumentation ion pump
Sputter-ion pump for use with electron tubes having thoriated tu
Sputter-ion pump having improved cooling and improved magnetic c
Vacuum maintenance device for high vacuum chambers