High voltage feedthrough for ion pump

Details High voltage feedthrough for ion pump High voltage feedthrough for ion pump

1985-12-19

1987-08-18

Croyle, Carlton R.

Pumps

Electrical or getter type

Ionic with gettering

313560, F04B 3702, F04F 1100

Patent

active

046874178

ABSTRACT:
Ion pump (10) has feedthrough (33) for electrical connection to anode post (32) within the pumping chamber. Opening (36) in the pumping chamber wall receives a portion of insulator (42). The insulator (42) has a flange (48) which is of larger diameter than the opening (36) so that sputtered cathode material cannot directly disposit on the outer and upper surfaces of the flange (48).

REFERENCES:
patent: 3018944 (1962-01-01), Zaphiropoulos
patent: 3088657 (1963-05-01), Zaphiropoulos
patent: 3174069 (1965-03-01), Jepsen
patent: 3228590 (1966-01-01), Kearns
patent: 3381890 (1968-05-01), Hayashi

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