Pumps – Electrical or getter type – Ionic with gettering
Patent
1981-12-14
1984-07-17
Look, Edward K.
Pumps
Electrical or getter type
Ionic with gettering
F04B 3702
Patent
active
044603177
ABSTRACT:
An ion pump is described which includes a vacuum housing, a unique, readily removable and replaceable magnet system which makes it possible to measure leakage current alone and a unique, readily removable and replaceable reactive metal cathode for reacting with gaseous ions impinging thereon for their collection. It also includes a novel tandem sputter shielding arrangement for preventing deposition of sputter products on the anode insulator. Both power supply and current metering means which may be mounted on and directly connected to the ion pump are also described.
REFERENCES:
patent: 2114339 (1938-04-01), Espe
patent: 3228590 (1966-01-01), Kearns et al.
patent: 3249291 (1966-05-01), Ackley
patent: 3319875 (1967-05-01), Jepsen
patent: 3371853 (1968-03-01), Maliakal
patent: 3994625 (1976-11-01), Welch
Kern Robert H.
Levesque Wilfred P.
Kernco, Inc.
Look Edward K.
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