Particle beam instrumentation ion pump

Pumps – Electrical or getter type – Ionic with gettering

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328233, F04B 3702

Patent

active

043976115

ABSTRACT:
In particle beam optical instrumentation, an array of conventional sputter ion pump cells distributed in a ring shaped array about the circumference of the volume (optical column) to be pumped. An axially symmetrical, hollow, toroid magnetic circuit, formed by axially symmetrical magnets, either of the permanent type or of the electromagnetic type (or a combination of both), is used and the pumping action is outward from the central throughbore in the column so that the bore space could be occupied by other instrumentation. The magnetic circit may be used for particle beam focusing (optical lens) as well as for the pumping action by introducing magnetic gaps in either a series or parallel configuration.

REFERENCES:
patent: 3299311 (1967-01-01), Veith et al.
patent: 3379365 (1968-04-01), Hait
patent: 3463959 (1969-08-01), Jory et al.
patent: 3596123 (1971-07-01), Levin

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