Ion pump for producing an ultrahigh degree of vacuum

Pumps – Electrical or getter type – Ionic with gettering

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313 7, 31511191, F04B 3702

Patent

active

043891659

ABSTRACT:
An ion pump for producing an ultrahigh degree of vacuum comprising a space formed between a first perforated flat plate-shaped electrode and a second flat plate-shaped electrode and having a high frequency electric source connected between the first and second electrodes, said space being operative to induce multipactor effect between said first and second electrodes, and an ionization space adjacent to one of said first and second electrodes and formed between a first perforated getter electrode and a second getter electrode applied with a negative potential, said ionization space being operative to cause the moving electrons produced by the multipactor effect to collide with gas molecules and ionize the latter.

REFERENCES:
patent: 3198422 (1965-08-01), Kienel
patent: 3274436 (1966-09-01), Reich
patent: 3521146 (1970-07-01), Forrer
patent: 3542488 (1970-11-01), Hall
patent: 3543135 (1970-11-01), O'Brien et al.

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