Ion pump

Details Ion pump Ion pump

1983-08-22

1986-12-23

Niebling, John F.

Pumps

Electrical or getter type

Ionic with gettering

204298, F04F 1100

Patent

active

046310029

ABSTRACT:
A sputter ion pump with a cathode having blades arranged radially adjacent the cylindrical hollow cells of the anode.
This arrangement increases the probability of grazing collisions useful for the formation of fast inert gas molecules, particularly argon. This improves the pumping speed and the speed stability in time.

REFERENCES:
patent: 3070283 (1962-12-01), Hall
patent: 3319875 (1967-05-01), Jepsen
L. I. Maissel et al, Handbook of Thin Film Technology, McGraw-Hill Book Co., New York, 1970, 2-34 to 2-39.

Affiliated with

Also associated with

Rating

Ion pump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ion pump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion pump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-169684