Sputter-ion pump having improved cooling and improved magnetic c

Details Sputter-ion pump having improved cooling and improved magnetic c Sputter-ion pump having improved cooling and improved magnetic c

1975-02-18

1976-11-30

Freeh, William L.

Pumps

Electrical or getter type

Ionic with gettering

313179, F04B 3702

Patent

active

039946258

ABSTRACT:
In a magnetically confined sputter-ion vacuum pump a multi-apertured anode electrode is interposed between a pair of reactive cathode electrode plates. An evacuable envelope encloses the anode and cathode electrodes and a magnetic circuit surrounds the vacuum envelope for producing a glow discharge confining magnetic field extending axially of the apertures in the anode. The reactive cathode plates include peripheral sealing flanges for compressing a sealing gasket into sealing engagement with a pair of sealing surfaces at opposite ends of a tubular main body portion of the envelope. A clamping ring structure, having a bolt circle formed therein, serves to clamp the two reactive cathode plates to the main body and also serves as an integral part of the magnetic circuit. Water coolant channels are brazed to the outer surfaces of the cathode plates for cooling same in use. The magnetic circuit includes a pair of ferrite magnets disposed outside the envelope on opposite sides of the cathodes and enclosed by a magnetic yoke to minimize the size and weight of the magnet and to reduce unwanted stray magnetic fields.

REFERENCES:
patent: 2169879 (1939-08-01), McArthur et al.
patent: 3159333 (1964-12-01), Helmer
patent: 3176906 (1965-04-01), Redhead
patent: 3236442 (1966-02-01), Davis et al.
patent: 3331975 (1967-07-01), Jepsen
patent: 3379365 (1968-04-01), Hait
patent: 3540812 (1970-11-01), Henderson et al.

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