Ion drag vacuum pump

Details Ion drag vacuum pump Ion drag vacuum pump

1997-08-25

1999-05-04

Thorpe, Timothy S.

Pumps

Electrical or getter type

Ionic with gettering

417 48, 417 50, F04F 1100

Patent

active

058996664

ABSTRACT:
An ion drag vacuum pump is installed in a body, one side of which is connected to and in communication with a sealed chamber. An ion generating device and a positive ion dragging device for dragging positive ions generated by the ion generating device to exhaust gases located near the ions by speeding up the ions is disposed in the body. The positive ions are neutralized by a positive ion neutralizing device. The ion generating device includes a corona electrode as a corona discharger to which a positive voltage is applied, a metal plate as a DC glow discharger to which a positive DC voltage is applied, or a first RF electrode and a second RF electrode to which RF power is applied. The ion dragging device includes a target electrode or a first and a second grids to which a positive and a negative voltage are respectively applied. The ion neutralizing device includes a grounded baffle plate.

REFERENCES:
patent: 3827829 (1974-08-01), Tom
patent: 4812711 (1989-03-01), Torok et al.

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