Closed-drift hall effect plasma vacuum pump for process...

Details Closed-drift hall effect plasma vacuum pump for process... Closed-drift hall effect plasma vacuum pump for process...

2005-05-31

2005-05-31

Tyler, Cheryl (Department: 3746)

Pumps

Electrical or getter type

Ionic with gettering

C417S048000, C417S053000, C417S313000, C118S715000

Reexamination Certificate

active

06899527

ABSTRACT:
A closed-drift Hall effect plasma vacuum pump includes one or more pumping conduits which are linked with a radial magnetic field. The magnetic field separates a plasma from a plasma at a higher pressure which is formed by cross-field plasma transport from a plasma processing region.

REFERENCES:
patent: 3151259 (1964-09-01), Per Gloersen et al.
patent: 4641060 (1987-02-01), Dandl
patent: 5475354 (1995-12-01), Valentian et al.
patent: 5482611 (1996-01-01), Helmer et al.
patent: 5581155 (1996-12-01), Morozov et al.
patent: 5845880 (1998-12-01), Petrosov et al.
patent: 5975855 (1999-11-01), Ensberg et al.
patent: 08-162412 (1996-06-01), None
patent: WO 00/00741 (2000-01-01), None

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