Anode-cathode structure for ion pump having specifically determi

Details Anode-cathode structure for ion pump having specifically determi Anode-cathode structure for ion pump having specifically determi

1996-12-26

1999-11-09

Oen, William

Pumps

Electrical or getter type

Ionic with gettering

313 7, F04B 3702, F04F 1100, H01J 716

Patent

active

059802120

ABSTRACT:
A sputter ion pump in which the ratio of the length L to the diameter D of each anode cell forming a multi-cell anode inserted between two cathodes is defined within a certain range, thereby increasing a critical vacuum level to be evacuated and achieving a higher exhaust speed.

REFERENCES:
patent: 4397611 (1983-08-01), Wiesner et al.
patent: 4631002 (1986-12-01), Pierini
H. Hartwig et al. "A new approach for computing diode sputter-ion pump characteristics", J. Vac. Sci. Technol., vol. 11, No. 6, Nov./Dec. 1994, pp. 1154-1159.
Kimo M. Welch, "Capture Pumping Technology", 1991, pp. 65-183. (no month).

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