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Alignment method and apparatus, lithographic apparatus,...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment method and arrangement for use with a view camera

Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent

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Alignment method and exposure apparatus using the same

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment method and exposure system

Optics: measuring and testing – By alignment in lateral direction
Patent

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Alignment method and parameter selection method

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment method and pattern forming method using the same

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment method for optimizing extinction ratios of coated...

Optics: measuring and testing – By polarized light examination
Reexamination Certificate

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Alignment method for parabolic trough solar concentrators

Optics: measuring and testing – Angle measuring or angular axial alignment
Reexamination Certificate

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Alignment method for performing alignment between shot areas on

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Alignment method, alignment apparatus, exposure apparatus...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment method, alignment apparatus, exposure apparatus...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment method, alignment system, and product with...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Alignment method, method of measuring front to backside...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment of a rotatable polarizer with a sample

Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate

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Alignment of an ellipsometer or other optical instrument using a

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Alignment of an object

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment of diffraction gratings

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Alignment of ellipsometer beam to sample surface

Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate

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Alignment of light collector to laser scanline

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Alignment of lithographic system

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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