Alignment of diffraction gratings

Details Alignment of diffraction gratings Alignment of diffraction gratings

1977-05-03

1980-04-29

Clark, Conrad J.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, 250550, 356400, G01B 902

Patent

active

042003954

ABSTRACT:
First and second plates are formed with like periodic patterns. A laser beam illuminates the second plate through the alignment marks of the first plate to provide a pair of diffracted beams that are detected with alignment being indicated when the beams are of the same intensity.

REFERENCES:
patent: 3738753 (1973-06-01), Huntley, Jr.
patent: 3796498 (1974-05-01), Post
patent: 3867038 (1975-02-01), Westell
patent: 4074131 (1978-02-01), Schwebel
patent: 4079252 (1978-03-01), Brake

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