Alignment of an ellipsometer or other optical instrument using a

Details Alignment of an ellipsometer or other optical instrument using a Alignment of an ellipsometer or other optical instrument using a

1991-07-01

1993-04-27

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356369, 356154, G01B 1100, G01J 400

Patent

active

052067068

ABSTRACT:
Alignment method and procedure for accurately determining the off-normal angle of incidence of an optical beam with a sample, for example, in ellipsometry. A diffraction grating is fabricated with a grating period chosen such that, when a laser beam irradiates the grating placed at the sample area, a beam is diffracted generally along the incoming laser beam. The laser is then angularly moved with respect to the grating until the two beams are auto-collimated, i.e., made coincident. The angle of incidence is then accurately determined from the laser wavelength and the grating period through well known equations.

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