Alignment method, alignment system, and product with...

Details Alignment method, alignment system, and product with... Alignment method, alignment system, and product with...

2008-12-11

2011-12-06

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

C356S401000, C430S005000, C430S311000

Reexamination Certificate

active

08072615

ABSTRACT:
The position of a product is measured using an alignment mark on the product. Radiation is transmitted towards the alignment mark and diffracted by a pattern in the alignment mark. Position information is determined from phase relations of the diffracted radiation. The alignment mark comprises a set of mutually parallel conductor tracks from which the diffracted radiation is collected, the pattern being defined by a pattern of variation of the pitch between successive tracks as a function of position along the surface of the product. Thus, for example the pattern comprises alternating first and second areas wherein the pitch has a first and second value, respectively. Because the tracks in the different parts of the pattern, such as the first and second areas, are parallel to each other improved measurements are possible.

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