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Selecting a hypothetical profile to use in optical metrology

Optics: measuring and testing – Dimension

Reexamination Certificate

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Selecting a hypothetical profile to use in optical metrology

Optics: measuring and testing – Dimension

Reexamination Certificate

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Semiconductor device manufacturing method, semiconductor...

Optics: measuring and testing – Dimension – Thickness

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Shape measuring apparatus

Optics: measuring and testing – Dimension – Width or diameter

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Sheet thickness measuring device and image forming apparatus

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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Slit confocal autofocus system

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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Stage apparatus and vision measuring apparatus

Optics: measuring and testing – Dimension

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Storage media monitoring method for archive management

Optics: measuring and testing – Dimension

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Structure for lithographic focus control features

Optics: measuring and testing – Dimension

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Structure inspection method, pattern formation method,...

Optics: measuring and testing – Dimension

Reexamination Certificate

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Substrate film thickness measurement method, substrate film...

Optics: measuring and testing – Dimension – Thickness

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Substrate film thickness measurement method, substrate film...

Optics: measuring and testing – Dimension – Thickness

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Substrate film thickness measurement method, substrate film...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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Substrate film thickness measurement method, substrate film...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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Substrate holder, and use of the substrate holder in a...

Optics: measuring and testing – Dimension – Thickness

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Substrate thickness determination

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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Surface inspection apparatus

Optics: measuring and testing – Dimension – Thickness

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System and method for CD determination using an alignment...

Optics: measuring and testing – Dimension

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System and method for correction for angular spread in...

Optics: measuring and testing – Dimension – Thickness

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System and method for detecting dropping amount of liquid...

Optics: measuring and testing – Dimension – Volume

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