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In situ proximity gap monitor for lithography

Optics: measuring and testing – Dimension

Reexamination Certificate

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In-situ absolute measurement process and apparatus for film...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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In-situ automated contactless thickness measurement for...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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In-situ method and apparatus for end point detection in...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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In-situ method and apparatus for end point detection in...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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In-situ thickness and refractive index monitoring and...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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Inspection apparatus and method of inspection

Optics: measuring and testing – Dimension

Reexamination Certificate

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Inspection apparatus and method of inspection

Optics: measuring and testing – Dimension

Reexamination Certificate

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Integrated circuit profile value determination

Optics: measuring and testing – Dimension – Width or diameter

Reexamination Certificate

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Internal and external measuring device

Optics: measuring and testing – Dimension – Cavities

Reexamination Certificate

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