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Electronic leveling apparatus and method

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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End point detection in workpiece processing

Optics: measuring and testing – Dimension – Thickness
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End point detection in workpiece processing

Optics: measuring and testing – Dimension – Thickness
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End point detector for etching equipment

Optics: measuring and testing – Dimension – Thickness
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Endpoint detector and method for measuring a change in wafer...

Optics: measuring and testing – Dimension – Thickness
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Endpoint determination for recess etching to a precise depth

Optics: measuring and testing – Dimension – Cavities
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Examining a structure formed on a semiconductor wafer using...

Optics: measuring and testing – Dimension
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Examining a structure formed on a semiconductor wafer using...

Optics: measuring and testing – Dimension
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Extraction of tool independent line-edge-roughness (LER)...

Optics: measuring and testing – Dimension
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