Substrate holder, and use of the substrate holder in a...

Details Substrate holder, and use of the substrate holder in a... Substrate holder, and use of the substrate holder in a...

2006-07-25

2006-07-25

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

Reexamination Certificate

active

07081963

ABSTRACT:
The invention discloses a substrate holder (8) that is configured to receive a substrate (20) and can be utilized to determine the thickness deviation of a substrate from the standard thickness of a specific substrate type. The substrate holder (8) comprises a one-piece frame having a flat upper surface (42). An opening (30) that defines a peripheral rim (32) is provided in the substrate holder (8). Receiving elements (34) on which spheres are provided are shaped onto the peripheral rim (32) of the opening (30). A substrate (20) placed into the substrate holder (8) thus comes to rest on the upper surfaces of the spheres. The support elements (34) are arranged on the peripheral rim of the opening (30) in such a way that they lie at the vertices of an equilateral triangle. In addition, the spacing from the upper surface of the spheres to the flat upper surface (42) of the substrate holder (8) is dimensioned such that said spacing corresponds substantially to the standard thickness of the substrate type being used.

REFERENCES:
patent: 3804523 (1974-04-01), McCormack
patent: 4549843 (1985-10-01), Jagusch et al.
patent: 4583847 (1986-04-01), Battig et al.
patent: 4609285 (1986-09-01), Samuels
patent: 4655594 (1987-04-01), Wittekoek et al.
patent: 4920273 (1990-04-01), Sacks et al.
patent: 4924258 (1990-05-01), Tsutsui
patent: 5539521 (1996-07-01), Otokake et al.
patent: 5608773 (1997-03-01), Korenaga et al.
patent: 5671054 (1997-09-01), Iwasaki
patent: 5786897 (1998-07-01), Ototake
patent: 5870200 (1999-02-01), Berndt
patent: 5894056 (1999-04-01), Kakizaki et al.
patent: 5959731 (1999-09-01), Jones
patent: 6172752 (2001-01-01), Haruna et al.
patent: 6301006 (2001-10-01), Doan
patent: 6545765 (2003-04-01), Ganser et al.
patent: 0 702 206 (1996-03-01), None
patent: 1014030 (2000-06-01), None
patent: 409184709 (1997-07-01), None
patent: WO 99/57508 (1999-11-01), None
SPIE, vol. 3096-0277-786X/97, pp. 433-444 entitles “Advanced Mask Metrology System for up to 4Gbit DRAM” by Taro Ototake et. al.
SPIE, vol. 3096-0277-786X/97, pp. 433-444 entitled “Advanced Mask Metrology System for up to 4Gbit DRAM” by Taro Ototake et al.

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