Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2006-07-04
2006-07-04
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
C451S005000, C451S008000
Reexamination Certificate
active
07072050
ABSTRACT:
A jet of water in a cylindrical form is supplied from a jet nozzle onto a measurement surface of a substrate to form a column of the water extending between the nozzle and the measurement surface. Light is emitted from an irradiation fiber and transmitted through the column of water to the measurement surface. The light reflected by the measurement surface is received by a light-receiving fiber through the column of water. A measurement calculation unit measures the thickness of a film formed on the substrate, based on the intensity of the reflected light.
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Kimba Toshifumi
Nakai Shunsuke
Ebara Corporation
Pham Hoa Q.
Wenderoth , Lind & Ponack, L.L.P.
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