Surface inspection apparatus

Details Surface inspection apparatus Surface inspection apparatus

2007-06-05

2007-06-05

Nguyen, Sang H. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S369000

Reexamination Certificate

active

11274248

ABSTRACT:
A surface inspection apparatus (100) comprises a light (10) source for emitting a light beam L0, an optical illumination system (30) for projecting the light beam on an inspected surface (220) formed by a film210, an optical detection system (50) having lenses to spatially split reflection lights and an aperture stop (60) having apertures disposed with polarization elements (61–64) for transilluminating mutually different polarized light components, a light intensity detection device (41–44) for individually detecting the light intensities of the respective reflection lights passed through the respective polarization elements, a scanning device (20), and an arithmetic processing device (70) for detecting the polarization conditions of the respective reflection lights and obtaining a film thickness of the film and at least one of the physical properties of the film.

REFERENCES:
patent: 5333052 (1994-07-01), Finarov
patent: 5835220 (1998-11-01), Kazama et al.
patent: 6795185 (2004-09-01), Yoshizawa et al.
patent: 2005/0270522 (2005-12-01), Miyakawa et al.
patent: 07-159131 (1995-06-01), None

Affiliated with

Also associated with

Rating

Surface inspection apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface inspection apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface inspection apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3841952