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Rapid-response electron-beam deposition system having a...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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Real-time system for monitoring and controlling film...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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Reflective film thickness measurement method

Optics: measuring and testing – Dimension – Thickness
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Resolution enhanced optical metrology

Optics: measuring and testing – Dimension – Width or diameter
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