Substrate film thickness measurement method, substrate film...

Details Substrate film thickness measurement method, substrate film... Substrate film thickness measurement method, substrate film...

2008-09-23

2008-09-23

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Dimension

Thickness

C451S005000, C451S008000

Reexamination Certificate

active

11430976

ABSTRACT:
A jet of water in a cylindrical form is supplied from a jet nozzle onto a measurement surface of a substrate to form a column of the water extending between the nozzle and the measurement surface. Light is emitted from an irradiation fiber and transmitted through the column of water to the measurement surface. The light reflected by the measurement surface is received by a light-receiving fiber through the column of water. A measurement calculation unit measures the thickness of a film formed on the substrate, based on the intensity of the reflected light.

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