Stage apparatus and vision measuring apparatus

Details Stage apparatus and vision measuring apparatus Stage apparatus and vision measuring apparatus

2005-06-08

2008-09-30

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

C356S628000

Reexamination Certificate

active

07430050

ABSTRACT:
A stage apparatus (100) includes a stage glass (210) having on an upper surface a stage surface (211) of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter (220) with a flat plane, which is provided to substantially all over a lower surface of the stage glass (210) and illuminates the workpiece (W) with contour illumination through the stage glass (210), and a supporting section (300), which supports at plurality of points on a lower face side of the plane light emitter (220) and adjusts the flatness of the stage surface (211) by adjusting the height at a plurality of supporting points.

REFERENCES:
patent: 4654762 (1987-03-01), Laverick
patent: 2003/0011898 (2003-01-01), Mai et al.
patent: 2003/0053045 (2003-03-01), Doering
patent: 0 324 561 (1989-07-01), None
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patent: A 2000-147171 (2000-05-01), None
patent: A 2001-41711 (2001-02-01), None
patent: A 2002-207004 (2002-07-01), None

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