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Wafer measurement system and apparatus

Optics: measuring and testing – By light interference – For dimensional measurement
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Wave meter for measuring the wavelength of an optical...

Optics: measuring and testing – By light interference – Spectroscopy
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Wavefront analysis method involving multilateral...

Optics: measuring and testing – By light interference – Having wavefront division
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Wavefront and intensity analyzer for collimated beams

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront measuring apparatus and wavefront measuring method

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront measuring apparatus and wavefront measuring method

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront measuring method and wavefront measuring apparatus...

Optics: measuring and testing – By light interference
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Wavefront sensor using hybrid optical/electronic heterodyne...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Wavefront sensor with optical path difference compensation

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront splitting element for EUV light and phase...

Optics: measuring and testing – By light interference – Having wavefront division
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Wavefront-aberration measuring device and exposure apparatus...

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront-aberration measuring device and exposure apparatus...

Optics: measuring and testing – By light interference – For dimensional measurement
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Waveguide based parallel multi-phaseshift interferometry for...

Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer
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Wavelength and intensity monitoring of optical cavity

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Wavelength detecting apparatus, laser apparatus, and...

Optics: measuring and testing – By light interference – Spectroscopy
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Wavelength determining apparatus and method

Optics: measuring and testing – By light interference
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Wavelength determining device, wavelength meter equipped...

Optics: measuring and testing – By light interference
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Wavelength determining device, wavelength meter equipped...

Optics: measuring and testing – By light interference
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Wavelength dispersive fourier transform spectrometer

Optics: measuring and testing – By light interference – Spectroscopy
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Wavelength dispersive fourier transform spectrometer

Optics: measuring and testing – By light interference – Spectroscopy
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