Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-09-16
2010-06-08
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07733500
ABSTRACT:
In a wavefront sensor, an optical wavefront to be measured is split into a first optical path and a second optical path. A wavefront W1in the first optical path is transmitted through a first compensation member7, and a wavefront W2in the second optical path is transmitted through a second compensation member8. Wavefronts W1and W2are mixed together by a semi-transparent mirror6with the wavefronts being displaced from each other by a shearing quantity S to form an interference fringe. An optical path difference that occurs between two wavefronts W1′ and W2′ which reach the interference measurement plane M in a state where the wavefronts are inclined due to the arrival direction of the optical wavefront to be measured is compensated when the wavefronts W1′ and W2′ are transmitted through the first and second optical path difference compensation members7and8, respectively.
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patent: 2003/0223077 (2003-12-01), Hill
patent: 2006/0154156 (2006-07-01), Farah
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Hayano Yutaka
Nishikawa Jun
Birch & Stewart Kolasch & Birch, LLP
Chowdhury Tarifur
Cook Jonathon D
National Institutes of Natural Sciences
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