Wavefront splitting element for EUV light and phase...

Details Wavefront splitting element for EUV light and phase... Wavefront splitting element for EUV light and phase...

2006-01-03

2006-01-03

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

Having wavefront division

C356S503000

Reexamination Certificate

active

06982796

ABSTRACT:
A wavefront splitting element includes a diffraction grating for splitting light into multiple beams including transmitting light and reflected light.

REFERENCES:
patent: 4768183 (1988-08-01), Ohnishi et al.
patent: 5574560 (1996-11-01), Franz et al.
patent: 6498685 (2002-12-01), Johnson
patent: 6678037 (2004-01-01), Van Elp et al.
patent: 6861846 (2005-03-01), Anderson
patent: 2003/0144819 (2003-07-01), Takeuchi et al.

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