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Precise positioning of optical fibers

Optics: measuring and testing – By alignment in lateral direction
Patent

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Precision IC alignment keys and method

Optics: measuring and testing – By alignment in lateral direction
Patent

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Precision micropositioner

Optics: measuring and testing – By alignment in lateral direction
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Precision wafer driving device by utilizing solid type actuator

Optics: measuring and testing – By alignment in lateral direction
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Probe apparatus for measuring electrical characteristics of obje

Optics: measuring and testing – By alignment in lateral direction
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Process and apparatus for manufacturing semiconductor device

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Process and apparatus for theoptical alignment of patterns in tw

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Process and device for ascertaining whether two successive...

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Process and device for determining the center-line of a curvatur

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Process for positioning a mask relative to a workpiece and devic

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection aligner

Optics: measuring and testing – By alignment in lateral direction
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Projection aligner for fabricating semiconductor device having p

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection alignment method and apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Projection exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Projection exposure apparatus and aberration measurement method

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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