Projection aligner

Details Projection aligner Projection aligner

1991-11-05

1993-10-12

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

355 53, G01B 1100

Patent

active

052530400

ABSTRACT:
A projection aligner includes a light source, a condenser lens system for directing light from the light source onto a mask on which a circuit pattern is formed, a projecting lens system for collecting on the surface of a wafer the light transmitted through the mask, and an aperture member disposed between the light source and the condenser lens system. The aperture member includes a transmitting zone for transmitting light from the light source and a phase shift member for producing a predetermined phase difference between light transmitted through the transmitting zone and light transmitted through a region surrounding the transmitting zone.

REFERENCES:
patent: 3157087 (1964-11-01), Kallenberg
patent: 3892482 (1975-07-01), Weisglass
patent: 4257086 (1981-03-01), Gulliksen
patent: 4816876 (1989-03-01), Pryor
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 4988188 (1991-01-01), Ohta

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