Precision wafer driving device by utilizing solid type actuator

Details Precision wafer driving device by utilizing solid type actuator Precision wafer driving device by utilizing solid type actuator

1994-02-16

1995-08-01

Turner, Samuel A.

Optics: measuring and testing

By alignment in lateral direction

356375, 356358, 414754, 414757, G01B 1100

Patent

active

054384192

ABSTRACT:
A wafer positioning device providing superior precision in a very thin configuration. Piezoelectric (vs. electrostrictive) solid state actuators provide precise positioning. To provide a thin configuration, the actuators are positioned horizontally. To move the wafer vertically, and to magnify the stroke of the actuators, there are provided displacement transformers. The positioning device provides positioning along four degrees of motion. The device can be mounted onto an x-y table to provide positioning along all six degrees of motion.

REFERENCES:
patent: 4655594 (1987-04-01), Wittekoek et al.
patent: 4887904 (1989-12-01), Nakazato et al.

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